メ－カー                      装置名称
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MES AFTY                           1）LTPS用イオン注入装置
                                        2）アニール装置
                                        3）ALD成膜装置
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株式会社トプコン               1）Aligner
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Denko (YAC)                      1）PI Oven, CELL Oven, IR Oven
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HOYA Candeo Optronics     1）UV Light Source
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